KM-V · Bulk Materials and Small Batches

KM-V Vertical Supercritical Dryer

KM-V dries bulk materials, substrates and 8-inch wafers; standard V6/V8 chambers hold about 679/1162 mL.

Standard chamberKM-V6 approx. 679 mL
KM-V8 approx. 1162 mL
Wafer fixtures8-inch basket
Quantity by chamber and fixture
Pressure / Temperature0-2000 psi
-30 to 60°C
System configurationClosed-loop cooling
Condensation separation
KM-V Vertical Supercritical Dryer
A large-capacity vertical system for bulk materials and small-batch validation.
KM-V operating in a cleanroom
Field PhotoCleanroom operation
KM-V operating in a laboratory
Field PhotoLaboratory operation
KM-V installed in a cleanroom
Field PhotoCleanroom installation

Technical Specifications

KM-V Technical Specifications

These are the current design specifications. Items marked "per configuration" depend on the sample, fixtures and final proposal; the formal specification governs. CO2 consumption and cycle time depend on the sample and process window.

KM-V · Specifications
Standard sample chambersKM-V6: 6.5″ × 32 mm / approx. 679 mL; KM-V8: 8.5″ × 32 mm / approx. 1162 mL
Deep-chamber planCustom 4.5″–8.5″ chambers; volume and depth confirmed per project
Wafer fixtures8″ basket; quantity confirmed by chamber and fixture
Operating pressure0–2000 psi
Operating temperature−30 ~ 60 °C
Cooling / RecoveryClosed-loop cooling + condensation separation to reduce CO2 consumption
Wetted materials316L, confirmed per configuration
FiltrationOptional semiconductor-grade filtration
ControlsTouchscreen PLC/HMI with recipes and batch comparison
SafetyLid, over-temperature and over-pressure interlocks + emergency relief, verified during site acceptance
KM-V Product Sheet Product Sheet

Samples & Fixtures

KM-V Samples and Loading Options

Configure the basket and support structure for perforated trays, mesh supports or layered loading.

Perforated-tray loading configurationConfiguration
Basket Perforated-tray Loading

A perforated tray and circumferential liner hold aerogel pieces and other bulk or granular samples.

Mesh-basket configurationConfiguration
Basket Mesh Basket

Fine mesh with circumferential sealing supports thin and fragile samples.

Layered basket-loading configurationConfiguration
Basket Layered Loading

Arrange layers by sample size to increase single-batch capacity.

Bulk AerogelsSample Photo
Sample Bulk Aerogels

Dry larger volumes of highly porous materials as a complete piece.

8-inch wafersSample Photo
Sample 8″ Wafers and Fixtures

Validate wafer-scale drying and structural release processes.

Wafer and fixture samples for batch-process validationSample Illustration
Sample Small-Batch Process Validation

Process multiple samples together and compare batch process windows.

Engineering Features

Large-Capacity Chambers and Batch Control

KM-V closed-loop cooling, sample chamber, wafer fixtures and batch management Functional Diagram
  1. Closed-loop Cooling and Condensation Separation

    Stabilize filling conditions and recover CO2 to reduce consumption during repeated small-batch validation.

  2. Large Sample Chamber

    Standard KM-V6/KM-V8 chambers hold approx. 679/1162 mL; deep-chamber volume and depth are confirmed per project.

  3. 8″ Wafer Fixtures

    Wafer baskets, spacer rings and stack washers support wafer-scale drying validation.

  4. Recipe Management and Run Records

    Recipe storage and run logs make it easier to compare small validation batches.

Selection & Preparation

KM-V Selection Questions

Compare chamber sizes, operating ranges and applications →

How do the KM-V6 and KM-V8 standard chambers differ?

KM-V6 has a 6.5-inch × 32 mm chamber of about 679 mL; KM-V8 has an 8.5-inch × 32 mm chamber of about 1162 mL. Confirm loading capacity after allowing for holders.

Can KM-V dry 8-inch wafers, and how many fit in one batch?

An 8-inch wafer basket can be configured. Batch capacity depends on the chamber, basket design, wafer spacing and process requirements. Confirm the sample and fixture combination rather than inferring capacity from chamber volume.

What are the KM-V supercritical dryer operating pressure and temperature ranges?

The published ranges are 0–2000 psi and −30–60 °C. Confirm the program against the sample, solvent and exchange route. Final specifications and process validation govern actual operation.

Can KM-V use a deeper chamber, and when should I consider KM-S?

Custom deep chambers with 4.5–8.5-inch diameters can be evaluated; depth and volume are project-specific. Consider KM-S for 12-inch wafers, an automatic vessel lid or clean-line interfaces.

Resources KM-V product sheet (in Chinese) Download PDF · 0.6 MB →Read online →
Sample Testing

KM-V Sample Testing and Process Assessment

Provide samples, batch size and target morphology. We run the complete exchange, critical-point crossing and condensation-recovery process on the KM-V, then report sample condition and batch performance.

Requirements Review Send samples and confirm the plan Process Testing Results and Equipment Recommendations
Book a Sample Test Call 400-009-7890 Email sales@kimax-cpd.com

Test scope and schedule are subject to mutual confirmation.