KiMax · Beijing Shian Kelin

Supercritical Drying & Extraction Systems

Supercritical CO2 drying and extraction equipment with integrated support systems.
For microscopy sample preparation, aerogel and wafer drying, and natural-product and fine-chemical extraction.

KM-P
Benchtop R&D and sample prep
KM-V
Bulk materials and small batches
KM-S
8/12-inch wafer scale
SiLen
Supercritical CO2 extraction

01Process

Supercritical CO₂ Process Principles

Drying follows a single-phase CO₂ path to reduce capillary-pressure damage; extraction uses tunable solvent power to extract and separate target compounds.

CO₂ pressure-temperature phase diagram and supercritical region

Critical State

The CO₂ Critical Point and Supercritical Fluid

The critical point of CO₂ is 31.1°C and 7.38 MPa. Above both thresholds, CO₂ becomes a homogeneous fluid phase.

Five-step supercritical drying path: intermediate-solvent and liquid-CO₂ exchange

Drying Path

Solvent Exchange and Single-Phase Depressurization

An intermediate solvent and liquid CO₂ sequentially replace pore liquid. The system then crosses the critical point and depressurizes slowly to reduce capillary damage.

Supercritical CO₂ extraction, pressure-reduction separation and CO₂ recovery modules

Extraction Path

Solvent Power and Pressure-Based Separation

Dense CO₂ dissolves and carries target compounds. Reducing pressure or changing temperature precipitates them while CO₂ is recovered for recirculation.

02Equipment

Standard Drying and Extraction Systems

Four standard systems for benchtop preparation, bulk-material and wafer drying, and natural-product extraction.
Support systems include CO2 pressurization, heat exchange, separation and recovery, and control interlocks, configured for the process.

  1. 02.1 KiMax KM-P benchtop supercritical dryer Benchtop Laboratory

    KM-P Compact Supercritical Dryer

    An automated benchtop CO2 dryer with programmable operation.Best for: benchtop R&D, electron-microscopy preparation, aerogels and small micro/nano structures.

    View KM-P Details
    Sample chamber
    100–200 mL · 2.5–3.4″
    Operating pressure
    0–1500 psi
    Operating temperature
    0–50 °C
  2. 02.2 KiMax KM-V Vertical Supercritical Dryer Small Batch & Pilot

    KM-V Vertical Supercritical Dryer

    A large-capacity vertical CO2 dryer with program management and batch comparison.Best for: bulk materials, substrates and microsphere arrays, 8-inch wafers and small-batch validation.

    View KM-V Details
    Standard chamber
    679 / 1162 mL
    Wafers
    8″ · Quantity by fixture
    Cooling
    Closed-loop cooling · Condensation separation
  3. 02.3 KiMax KM-S 12-inch wafer supercritical drying system Wafer Production Line

    KM-S 12-inch Wafer Drying System

    For supercritical drying of 8/12-inch wafers and square substrates after wet processing.Best for: wafers and square substrates, clean production lines and automation integration.

    View KM-S Details
    Vessel lid
    Automatic lift
    Wetted parts
    316L
    Interfaces
    MES · Evaluated against line takt time
  4. 02.4 SiLen Deep Blue Supercritical Extraction System Extraction & Pilot

    SiLen Deep Blue Supercritical Extraction System

    Supercritical CO2 extraction for natural products, food, pharmaceutical intermediates and fine chemicals.Best for: feedstock extraction, separation research and laboratory validation.

    View SiLen Details
    Extraction vessel
    200 mL–3 L · By model
    Pressure
    Vessel rating up to 52 MPa
    Separation
    Single / dual stage · By plan

03Compare

Supercritical Drying and Extraction Equipment Comparison

Choose KM-P, KM-V or KM-S by sample size, batch volume and cleanliness class. Configure SiLen Deep Blue by vessel size, pressure, co-solvent and separation requirements.

Series Best fit Chamber / Vessel Pressure range Temperature range Key configuration
KM-P Benchtop laboratory use, SEM/TEM preparation, aerogels and micro/nano structures 2.5–3.4 inches, 100–200 mL Operating 0–1500 psi; safety limit 2000 psi Operating 0–50 °C; safety limit 55 °C Touchscreen recipes, modular sample chambers; filtration confirmed per configuration
KM-V Bulk materials, substrates and microsphere arrays, 8-inch wafers and small-batch validation KM-V6 approx. 679 mL; KM-V8 approx. 1162 mL; deep-chamber plans confirmed per project 0–2000 psi −30–60 °C Closed-loop cooling, condenser, spacer rings and 8-inch wafer basket; quantity confirmed by chamber and fixture
KM-S 8/12-inch wafers, square substrates, clean production lines and automation integration 13-inch chamber, up to 17 L; multi-wafer capacity depends on fixtures 0–3500 psi −30–80 °C Automatic vessel lid, 316L wetted parts, clean filtration and site-interface evaluation
SiLen Natural products, food, pharmaceuticals and fine chemicals 200 mL integrated unit; configurable 500 mL–3 L vessels, with 1 L-class standard Vessel rating up to 52 MPa; system pressure confirmed by pump and plan Published operating window ambient–50°C; some configurations support up to 80°C Dual-piston and co-solvent pumps, single/dual-stage separation and CO2 recovery configured by plan

04Engineering

Component Engineering and System Validation

Critical components are designed for pressure-drop cooling, dry-ice blockage, low-temperature sealing and high-pressure regulation, then validated through complete process cycles.

Critical Components

In-house Check, Metering and Back-pressure Valves

Precise liquid-CO2 inlet, check-flow and back-pressure control directly protects the sample. These three patented valve designs balance flow direction, fill rate, back-pressure profile and low-temperature seal life across real process windows.

  • Sample Chambers & Pressure Vessels Structure and interfaces defined by sample size, media state and process sequence
  • 316L Wetted Parts Materials, filtration grade and flow paths are specified for each system
  • Recipes & Data Logging Key process variables, operating states and alarms can be logged by project
In-house check valve, low-temperature metering valve and back-pressure valve with exploded engineering drawing

About UsBeijing Shian Kelin · KiMax Supercritical Processing

Technical Focus Supercritical CO2 drying, extraction, separation and recovery
Product Range Benchtop preparation, wafer drying, laboratory extraction and modular systems
Services Equipment selection, custom engineering, process validation and site integration

05Custom Systems

Custom Supercritical Systems

One engineering team handles sample testing, process assessment, design, assembly, commissioning and site delivery. Custom projects typically address the following four needs.

Sample conditions and process flow modules

Custom Requirement 01

Custom Chambers and Process Design

When sample size, batch volume or solvent system exceeds standard chambers, the CO2 supply, pressurization, heat exchange, separation and recovery stages can be engineered to the project.

Standard and target pressure-temperature windows

Custom Requirement 02

Custom Temperature and Pressure Ranges

For temperature, pressure or operating profiles beyond standard equipment capabilities, we assess and design the required thermal, pressurization and regulation systems.

Process interfaces for MES, data, alarms and cleanliness requirements

Custom Requirement 03

Production Interfaces and Clean Configuration

Control logic, data interfaces and materials are specified for the site MES, alarm systems and cleanliness requirements.

Materials, seals and validation requirements for special media

Custom Requirement 04

Special Media and Material Compatibility

For corrosive gases or liquids, wetted materials, seals and valve control are selected around chemical compatibility and service life.

Delivery Process

Custom Project Delivery

Sample tests establish process feasibility and the scope of customization. The engineering team completes design, assembly, commissioning and site installation, followed by the agreed acceptance checks.

  1. Sample Validation

    Run full process cycles on submitted samples to assess the operating window and feasibility.

  2. Design Review

    Review the process design, mechanical plan and component list, then agree on technical requirements and supply scope.

  3. Assembly & Commissioning

    Perform and document factory tests for leak tightness, pressure-temperature control, complete cycles and safety interlocks.

  4. Site Delivery

    Engineers install and commission on site, train operators and complete each agreed acceptance item.

06Applications

Typical Applications for Supercritical Drying and Extraction

SEM/TEM specimen holders and small-volume samples

SEM/TEM Specimen Preparation

Prepare biological samples, gels and delicate structures while reducing collapse and shrinkage.

200 mm patterned wafers and bare MEMS die samples

MEMS, Wafers & Micro/Nano Devices

Drying wafers and lithographic patterns after wet processing, MEMS cantilever release, 3D-printed microstructures and microsphere arrays seated in substrate recesses.

Aerogel, gel and advanced-material powder samples

Aerogel & Advanced-Material Drying

Reduce pore collapse and cracking in highly porous materials, MOFs and gel systems.

Natural-product feedstock preparation, loading and extraction process development

Natural-Product Extraction Development

Screen feedstock size, loading density, pressure-temperature programs and entrainer conditions to assess target yield and selectivity.

200 mm and 100 mm wafers, sample fixtures and validation samples

Sample Testing and Process Validation

Validate exchange paths and process windows with actual samples before selecting equipment.

Liquid, waxy and crystalline fractions from multistage separation

Multistage Separation & Fraction Collection

Collect light, oil and wax fractions across a separation-pressure gradient and compare precipitation order, purity and mass balance.

Frequently Asked Questions

Equipment Selection FAQ

Common questions about equipment selection, sample testing, critical point drying and extraction configurations.

KM-P · KM-V · KM-S · SiLen

How should I choose between the KM-P, KM-V and KM-S supercritical dryers?

KM-P is designed for benchtop R&D, electron-microscopy sample preparation, aerogels and micro/nano structures. KM-V handles bulk materials, substrates and microsphere arrays, 8-inch wafers and small-batch validation. KM-S supports 8/12-inch wafers and square substrates, and automated clean-line integration.

How does supercritical drying differ from conventional drying?

Conventional drying creates a liquid–vapor meniscus that can generate capillary pressure. Supercritical CO₂ drying first exchanges the solvent, enters the supercritical region and then depressurizes along a single-phase path, reducing damage to MEMS, aerogels and micro/nano structures.

Can I test samples before choosing equipment?

Yes. First confirm sample size, solvent-exchange method, target structure, throughput and cleanliness requirements, then select the appropriate KM-P, KM-V, KM-S or SiLen configuration.

Can you engineer custom supercritical equipment?

Yes. We can engineer sample chambers, extraction vessels, pressure-temperature windows, CO2 flow paths, separation and recovery, PLC/HMI controls, safety interlocks and site interfaces.

Do you supply supercritical extraction equipment?

Yes. The SiLen Deep Blue system supports natural-product, food, pharmaceutical-intermediate and fine-chemical R&D, with configurations selected by vessel size, pressure range, co-solvent needs and separation stages.

How should samples be prepared before supercritical drying?

Confirm sample size, solvent system, exchange steps, target morphology and cleanliness requirements. For water-containing samples or special solvents, review the exchange path and material compatibility in advance.

Can the equipment support clean configurations and data logging?

Available options include clean filtration, 316L tubing, pressure and temperature trend recording, alarm logs, PLC/HMI controls and data export. Wafer and production-line projects can also include site-interface integration.

What information should I prepare before requesting a recommendation?

Prepare the sample type, dimensions, batch size, solvent state, target morphology, pressure-temperature range, cleanliness class, site interfaces and any custom automation requirements.

Contact

Equipment Selection and Technical Consultation

For equipment selection, provide sample type, dimensions, batch size and cleanliness requirements. For extraction, add feedstock form, target compounds and throughput. Sample tests can help establish the required configuration.

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